Barrier properties of thin films polymerized from CF3H/C2H4 electron cyclotron resonance plasmas

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 291-294

  Walker, M ^a   Baumgartner K M ^a   Kaiser, M ^a   Lindenmaier, S ^a   Rauchle E ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Barrier properties; Plasma polymerized films; Polyethylene; Toluene permeability

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; MECHANICAL PERMEABILITY; MONOMERS; PLASTIC FILMS; POLYETHYLENES; POLYMERIZATION; THERMAL EFFECTS; THIN FILMS; TOLUENE;

TRIFLUOROMETHANE;

PLASTIC COATINGS;

EID: 0031369875     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00217-X     Document Type: Article

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