Flexible fluorocarbon wire coatings by pulsed plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 1814-1818

  Limb, Scott J ^a   Gleason, Karen K ^a   Edell, David J ^b   Gleason, Edward F ^c  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b HARVARD UNIVERSITY   (United States)

^c MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031502454     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580796     Document Type: Article

References (25)

1. B. D. Ratner, A. Chilkoti, and G. P. Lopez, Plasma Deposition, Treatment, and Etching of Polymers, edited by R. d'Agostino (Academic, San Diego, 1990), p. 463.
2. P. Ehrlich, J. Res. Natl. Bur. Stand. 51, 185 (1953).
3. S. V. Gangal, Encyclopedia of Polymer Science and Engineering, 2nd ed., edited by H. F. Mark, N. M. Bikales, C. G. Overberger, G. Menges, and J. I. Kroschwitz (Wiley, New York, 1989), Vol. 16, p. 577.
4. L. A. Thomson, F. C. Law, K. H. James, and N. Rushton, Biomaterials 12, 781 (1991).
5. R. Guidoin, N. Chakfe, S. Maurel, T. How, M. Batt, M. Marois, and C. Gosselin, Biomaterials 14, 678 (1993).
6. D. E. Ocumpaugh and H. L. Lee, Biomedical Polymers, edited by A. Rembaum and M. Shen (Marcel Dekker, New York, 1971), p. 101.
7. E. I. DuPont, "Dupont Policy Regarding Medical Applications of Dupont Materials" (1996).
8. H. Yasuda, Plasma Polymerization (Academic, Orlando, 1985).
9. R. d'Agostino, F. Cramarossa, F. Fracassis, and F. Illuzzi, Plasma Deposition Treatment, and Etching of Polymers, edited by R. d'Agostino (Academic, San Diego, 1990), pp. 95-162.
10. A. T. Bell, Top. Curr. Chem. 94, 43 (1980).
11. E. Kay, J. Coburn, and A. Dilks, Top. Curr. Chem. 94, 1 (1980).
12. R. J. Gambogi, D. L. Choraux, H. Yasuda, and F. D. Blum, J. Polym. Sci. Part A: Polym. Chem. 29, 1801 (1991).
13. I. Sugimoto, Macromolecules 24, 1480 (1991).
14. C. R. Savage, R. B. Timmons, and J. W. Lin, Adv. Chem. Ser. 236, 745 (1993).
15. J. P. Booth, G. Hancock, N. D. Perry, and M. J. Toogood, J. Appl. Phys. 66, 5251 (1989).
16. P. D. Richard, R. J. Mackunas, G. Lucovsky, G. G. Fountain, A. N. Mansow, and D. V. Tsu, J. Vac. Sci. Technol. A 3, 867 (1985).
17. M. B. Knickelbein, D. A. Webb, and E. R. Grant, Mater. Res. Soc. Symp. Proc. 38, 23 (1985).
18. W. K. Fisher and J. C. Corelli, J. Polym. Sci. Polym. Chem. Ed. 19, 2465 (1981).
19. H. He and M. F. Thorpe, Phys. Rev. Lett. 54, 2107 (1985).
20. M. F. Thorpe, J. Non-Cryst. Solids 57, 355 (1983).
21. J. Phillips, J. Non-Cryst. Solids 34, 153 (1979).
22. G. H. Dohler, R. Dandoloff, and H. Bilz, J. Non-Cryst. Solids 42, 87 (1980).
23. C. Angus and F. Jansen, J. Vac. Sci. Technol. A 6, 1778 (1988).
24. J. F. W. Billmeyer, J. Appl. Phys. 18, 431 (1947).
25. W. Groh and A. Zimmermann, Macromolecules 24, 6660 (1991).