Application of spectroscopic ellipsometry to characterization of optical thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4932, Issue , 2003, Pages 393-404

  Woollam, John A ^a,b   Bungay, Corey ^a   Yan, Li ^b   Thompson, Daniel W ^b   Hilfiker, James ^a  

^a J A WOOLLAM CO INC   (United States)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Generalized ellipsometry; Infrared spectroscopic ellipsometry; Optical anisotropy; Optical thin films; Vacuum ultraviolet; Visible

Indexed keywords

ANISOTROPY; BIREFRINGENCE; ELLIPSOMETRY; INFRARED SPECTROSCOPY; MATRIX ALGEBRA; MICROSTRUCTURE; PHASE COMPOSITION;

MULTILAYER STACKS;

THIN FILMS;

EID: 0041861010     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474854     Document Type: Conference Paper

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