Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 10294, Issue , 1999, Pages 3-28

  Woollam, John A ^a   Johs, Blaine D ^a   Herzinger, Craig M ^a   Hilfiker, James N ^a   Synowicki, Ron A ^a   Bungay, Corey L ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

Ellipsometry; metrology; optical properties; spectroscopy

Indexed keywords

DATA ACQUISITION; ELLIPSOMETRY; MEASUREMENTS; OPTICAL PROPERTIES; SPECTROSCOPIC ELLIPSOMETRY; SPECTROSCOPY; UNITS OF MEASUREMENT;

ADVANCED APPLICATIONS; BASIC THEORY; MATERIALS AND PROCESS; RESEARCH APPLICATIONS; TYPICAL APPLICATION; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

APPLICATION PROGRAMS;

EID: 84982143545     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.351660     Document Type: Conference Paper

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