Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 312-315

  Tiwald, Thomas E ^a   Thompson, Daniel W ^a   Woollam, John A ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000303554     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589802     Document Type: Article

References (13)

1. C. R. Pidgeon, in Handbook on Semiconductors, Vol. 2, edited by T. S. Moss and Minko Balkanski (North Holland, Amsterdam, 1980), pp. 227-230.
2. B. Jensen, Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, Boston, 1985), p. 169.
3. K. Krishnan and P. J. Stout, Practical Fourier Transform Infrared Spectroscopy, edited by J. R. Ferraro and K. Krishnan (Academic, Orlando, 1990), p. 285.
4. H. H. Wagner and R. R. Schaefer, J. Appl. Phys. 50, 2697 (1979).
5. H. Engstrom, J. Appl. Phys. 51, 5245 (1980).
6. A. Borghesi, C. Chen-Jia, G. Guizzetti, L. Nosenzo, A. Stella, S. U. Campisano, and E. Rimini, J. Appl. Phys. 58, 2773 (1985).
7. P. S. Hauge, Surf. Sci. 56, 148 (1976).
8. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977), Chap. 4, pp. 273, 332.
9. M. Miyao, T. Motooka, N. Natsuaki, and T. Tokuyama, Solid State Commun. 37, 605 (1981).
10. H. M. van Driel, Appl. Phys. Lett. 44, 617 (1984).
11. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes: The Art of Scientific Computing (Cambridge University Press, Cambridge, MA, 1988), Chap. 14.
12. H. R. Philipp, Handbook of Optical Constants in Solids, edited by E. D. Palik (Academic, Boston, 1985), p. 749.
13. W. R. Runyan, Silicon Semiconductor Technology (McGraw-Hill, New York, 1965), p. 199.