Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry: 157 nm and below

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 390-398

  Hilfiker, James N ^a   Singh, Bhanwar ^a   Synowicki, R A ^a   Bungay, C L ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER; REFRACTIVE INDEX; SUBSTRATES; THICKNESS MEASUREMENT; THIN FILMS; ULTRAVIOLET RADIATION; VACUUM TECHNOLOGY;

VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE);

PHOTOLITHOGRAPHY;

EID: 0033726198     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)