Optical constants and roughness study of dc magnetron sputtered iridium films

Journal of Applied Physics

Volumn 92, Issue 8, 2002, Pages 4386-4392

  Yan, Li ^a   Woollam, John A ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMAS; BULK METALS; DC MAGNETRON SPUTTERING; DEPOSITION PROCESS; FUSED SILICA SUBSTRATES; MICRO-ROUGHNESS; MIDDLE INFRARED; OPTICAL MODELS; SPECTRAL RANGE; SURFACE OVERLAYERS; VACUUM ULTRAVIOLETS; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

ATOMIC FORCE MICROSCOPY; OPTICAL CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS;

IRIDIUM;

EID: 18744416826     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1509091     Document Type: Article

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