High speed, large deflection deformable mirrors for focus and spherical aberration control

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 193-194

  Himiner, P ^a   Dickensheets, D ^a  

^a MONTANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ADAPTIVE OPTICS; DEFORMATION; ELECTRIC FIELDS; MEMBRANE TECHNOLOGY; MIRRORS; MOEMS; SPHERES;

CIRCULAR MIRRORS; DEFORMABLE MIRRORS; DYNAMIC BEHAVIORS; LARGE DEFLECTION; MAXIMUM ELECTRIC FIELD; MICRO-MACHINED; SPHERICAL ABERRATION CORRECTION; SPHERICAL ABERRATIONS;

ASPHERICS;

EID: 84963753833     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031507     Document Type: Conference Paper

References (6)

1. nd International Workshop on Adaptive Optics for Industry and Medicine: University of Durham, England 12-16 July 1999, Gordon D Love editor, World Scientific 1999.
2. D.M. Burns and V.M. Bright, Proceedings of the IEEE Microelectromechanical Systems, Jan 25-29, 1998, p460-465
3. David L. Dickensheets, Paul V. Ashcraft, Phillip A. Himmer, Proc. of the SPIE conference on Micromachining and Microfabrication, Santa Clara, Ca., 1999
4. Mark Mescher,Michael Vladimer,Jonathan Bernstein,MEMS 2002; The fifteenth IEEE International Conference on Micro Electro Mechanical Systems,Las Vegas, NV January 20,p511-515
5. D. L. Dickensheets, G. S. Kino, IEEE Journal of Microelectromecbanical Systems 7, 38 (1998)
6. David L. Dickensheets, Phillip A. Himmer, Robert Friholm, B. Jeffery Lutzenberger, Proc. of the SPIE conference on Micromachining and Microfabrication, Santa Clara, Ca., Sept. 18-20, 2000