Vertical comb array microactuators

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 43-48

  Selvakumar, A ^a   Najafi, K ^a   Juan, W H ^a   Pang, S ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; ELECTRODES; ELECTROSTATIC DEVICES; FABRICATION; MICROMACHINING; SILICON WAFERS; TECHNOLOGY;

BULK SILICON; ELECTROSTATIC ACTUATOR; POLYSILICON; SUB-MICRON GAPS; TRENCH REFILL TECHNOLOGY; VERTICAL COMB ARRAY MICROACTUATORS;

ACTUATORS;

EID: 0029181115     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)