A CMOS-MEMS lateral-axis gyroscope

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 162-165

  Xie, H ^a   Fedder, G K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; POLYSILICON;

COMB DRIVES; VIBRATORY GYROSCOPES;

GYROSCOPES;

EID: 0035016482     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)