Chemical crosstalk between heated gas microsensor elements operating in close proximity

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 167-176

  Wheeler, M C ^a   Tiffany, J E ^a   Walton, R M ^a   Cavicchi, R E ^a   Semancik, S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Chemical crosstalk; Chemical sensors; Micromachining; Microsensor; Oscillatory kinetics; Platinum; Sensor arrays; Sensor interference; Thin film; Tin oxide

Indexed keywords

CARBON MONOXIDE; MICROMACHINING; MICROSENSORS; OSCILLATIONS; OXIDATION; PLATINUM; REACTION KINETICS; SEMICONDUCTING TIN COMPOUNDS; THIN FILM DEVICES;

GAS MICROSENSOR ARRAYS;

CHEMICAL SENSORS;

EID: 0035875738     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00689-X     Document Type: Article

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