Synthesis of polytetrafluoroethylene-like films by a novel plasma enhanced chemical vapor deposition employing solid material evaporation technique

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 A, 2003, Pages 650-656

  Fujita, Kazushi ^a   Ito, Masafumi ^b   Hori, Masaru ^a   Goto, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b WAKAYAMA UNIVERSITY   (Japan)

Author keywords

CO2 laser; Electron cyclotron resonance plasma; Fluorocarbon film; Global warming; Infrared diode laser absorption spectroscopy; Plasma enhanced chemical vapor deposition; Polytetrafluoroethylene

Indexed keywords

ABSORPTION SPECTROSCOPY; CARBON DIOXIDE LASERS; ELECTRON CYCLOTRON RESONANCE; EVAPORATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER APPLICATIONS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYTETRAFLUOROETHYLENES; SEMICONDUCTOR LASERS; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ACTINOMETRIC OPTICAL SPECTROSCOPY; FOURIER TRANSFORM INFRARED ABSORPTION SPECTROSCOPY; INFRARED DIODE LASER ABSORPTION SPECTROSCOPY; POLYTETRAFLUOROETHYLENE-LIKE FILM;

PLASTIC FILMS;

EID: 0038682108     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.650     Document Type: Article

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