Formation of polytetrafluoroethylene thin films by using CO2 laser evaporation and XeCl laser ablation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 1981-1985

  Inayoshi, Muneto ^a   Hori, Masaru ^a   Goto, Toshio ^a   Hiramatsu, Mineo ^b   Nawata, Masahito ^b   Hattori, Shuzo ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b MEIJO UNIVERSITY   (Japan)

^c NAGOYA INDUSTRIAL SCIENCE RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; COMPOSITION; EVAPORATION; EXCIMER LASERS; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION); X RAY PHOTOELECTRON SPECTROSCOPY;

DEPOSITION RATE; LASER EVAPORATION; XENON CHLORIDE EXCIMER LASERS;

THIN FILMS;

EID: 0030190474     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580071     Document Type: Article

References (10)

1. L. Holland, H. Biederman, and S. M. Ojha, Thin Solid Films 35, L19 (1976).
2. P. P. Luff and M. White, Vacuum 18, 437 (1968).
3. W. De Wilde, Thin Solid Films 24, 101 (1974).
4. R. Harrop and P. J. Harrop, Thin Solid Films 3, 109 (1969).
5. D. T. Morrison and T. Robertson, Thin Solid Films 15, 87 (1973).
6. I. H. Pratt and T. C. Lausman, Thin Solid Films 10, 151 (1972).
7. G. B. Blanchet, Appl. Phys. Lett. 62, 479 (1993).
8. G. B. Blanchet and S. Ismat Shah, Appl. Phys. Lett. 62, 1026 (1993).
9. S. Kuper and M. Stuke, Appl. Phys. Lett. 54, 4 (1989).
10. P. M. Goodwin and C. E. Otis, J. Appl. Phys. 69, 2584 (1991).