Microstructure and mechanical properties of surfactant templated nanoporous silica thin films: Effect of methylsilylation

Journal of the Electrochemical Society

Volumn 150, Issue 6, 2003, Pages

  Chen, J Y ^a   Pan, F M ^b   Cho, A T ^b   Chao, K J ^c   Tsai, T G ^b   Wu, B W ^b   Yang, C M ^c   Chang, Li ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; MECHANICAL PROPERTIES; MECHANICAL TESTING; MICROSTRUCTURE; POROUS MATERIALS; STRENGTH OF MATERIALS; SURFACE ACTIVE AGENTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

METHYLSILYLATION; NANOINDENTATION MEASUREMENT; NANOINDENTATION TESTING; SOL PRECURSOR SOLUTION;

SILICA;

EID: 0038608095     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1573200     Document Type: Article

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