Aerosol-gel deposition and low temperature heat-treatment of SiO2 layers

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 184-194

  Vautey, C ^a   Burgos, M ^a   Langlet, M ^a  

^a Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; AGING OF MATERIALS; CONDENSATION REACTIONS; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HYDROLYSIS; NUCLEAR MAGNETIC RESONANCE; PH; SILICA; SOLUTIONS; TEMPERATURE;

AEROSOL GEL DEPOSITION; MECHANICAL QUALITY EVALUATION TEST; POST DEPOSITION DRYING STAGE; REACTIVITY CONTROL; REESTERIFICATION; SILICA LAYERS;

THIN FILMS;

EID: 0345633673     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01755-6     Document Type: Article

References (29)

1. M. Langlet, J.C. Joubert, European Patent, 0,486,393 A1, (1991).
2. Langlet M., Vautey C., Mazeas N. Thin Solid Films. 299:1997;25.
3. Langlet M., Walz D., Marage P., Joubert J.C. Thin Solid Films. 221:1992;44.
4. Marage P., Langlet M., Joubert J.C. Thin Solid Films. 238:1994;218.
5. Langlet M., Marage P., Joubert J.C. Adv. Sci. Technol. 5:1995;267.
6. Primeau N., Vautey C., Langlet M. Thin Solid Films. 310:(1-2):1997;47.
7. Unger B., Jancke H., Hähnert M., Sol-Gel Sci J. Technol. 2:1994;51.
8. Ying J.Y., Benziger B., Non-Cryst J. Solids. 147:1992;222.
9. Boonstra A.H., Bernards T.N.M., Non-Cryst J. Solids. 108:1989;249.
10. Boonstra A.H., Baken J.M.E. J. Non-Cryst. Solids. 122:1990;171.
11. Bernards T.N.M., Van Bommel M.J., Oomen E.W.J.L., Boonstra A.H., Non-Cryst J. Solids. 147:1992;13.
12. Van Bommel M.J., Bernards T.N.M., Oomen E.W.J.L., Boonstra A. J. Non-Cryst. Solids. 147:1992;80.
13. Logan D.L., Ashley C.S., Assink R.A., Brinker C.J. Sol-Gel Optics II. Mackenzie J.D. SPIE Proc. 1758:1992;. p. 519.
14. Logan D.L., Ashley C.S., Brinker C.J. Better Ceramics Through Chemistry V. Hampden-Smith M., Klemper W.G., Brinker C.J. Mater. Res. Soc. Proc. 271:1992;. p. 541.
15. Logan M.N., Prabakar S., Brinker C.J. Mater. Res. Soc. Symp. Proc. 346:1994;115.
16. C. Vautey, Ph.D. thesis, Institut National Polytechnique de Grenoble, 1998.
17. Orcel G., Phalippou J., Hench L.L. J. Non-Cryst. Solids. 88:1986;114.
18. Parril T.M. J. Mater. Res. 7:1992;2230.
19. Floch H.G., Belleville P.F. Sol-Gel Optics II. 1758:1992;135.
20. Olsen J.E., Shimura F. J. Appl. Phys. 66:(3):1989;1353.
21. Orgaz F., Rawson H. J. Non-Cryst. Solids. 82:1986;57.
22. Sokoll R., Tiler H.J., Hoyer T. J. Electrochem. Soc. 138:(7):1991;2150.
23. Nakamura M., Kanzawa R., Sakai K. J. Electrochem. Soc. 133:1986;1167.
24. Lange P. J. Appl. Phys. 66:(1):1989;201.
25. Hook R.J. J. Non-Cryst. Solids. 195:1996;1.
26. Brinker C.J., Scherer G.W. Sol-Gel Science. 1990;Academic Press, San-Diego, CA. p. 212.
27. Brinker C.J., Scherer G.W. Sol-Gel Science. 1990;Academic Press, San-Diego, CA. p. 123.
28. Brinker C.J., Scherer G.W. Sol-Gel Science. 1990;Academic Press, San-Diego, CA. p. 194.
29. Brinker C.J., Hurd A.J. J. Phys. III France. 4:1994;1231.