Effect of sol rheology on the uniformity of spin-on silica xerogel films

Journal of Applied Physics

Volumn 86, Issue 10, 1999, Pages 5870-5878

  Nitta, S V ^a   Jain, A ^a   Wayner Jr , P C ^a   Gill, W N ^a   Plawsky, J L ^a  

^a Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000201410     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371605     Document Type: Article

References (39)

1. S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, Jr., W. N. Gill, and J. L. Plawsky, J. Vac. Sci. Technol. B 17, 205 (1999).
2. C. J. Lawrence and W. Zhou, J. Non-Newtonian Fluid Mech. 39, 137 (1991).
3. A. Acrivos, M. J. Shah, and E. E. Peterson, J. Appl. Phys. 31, 963 (1960).
4. C. J. Brinker and G. W, Scherer, Sol-Gel Science (Academic, New York, 1990).
5. M. Sacks and R. Sheu, J. Non-Cryst. Solids 92, 383 (1987).
6. D. M. Smith, J. Anderson, C.-C. Cho, and B. E. Gnade, Mater. Res. Soc. Symp. Proc. 371, 261 (1995).
7. C.-C. Cho, D. M. Smith, and J. Anderson, Mater. Chem. Phys. 42, 91 (1995).
8. H.-S. Yang, Y.-S. Choi, S.-H. Hyun, H.-H. Park, and J.-K. Hong, J. Non-Cryst. Solids 221, 151 (1997).
9. M.-H. Jo, H.-H. Park, D.-J. Kim, S.-H. Hyun, S.-Y. Choi, and J.-T. Paik, J. Appl. Phys. 82, 1299 (1997).
10. M-H. Jo, J.-K. Hong, H.-H. Park, J.-J. Kim, S.-H. Hyun, and S.-Y. Choi, Thin Solid Films 308-309, 490 (1997).
11. S. Sakka and K. Kamiya, J. Non-Cryst. Solids 48, 31 (1982).
12. J. A. Britten and I. M. Thomas, J. Appl. Phys. 71, 972 (1992).
13. R. B. Bird and P. J, Carreau, Chem. Eng. Sci. 23, 427 (1968).
14. A. Campero, J. Cardoso, and S. Pacheco, J. Sol-Gel Sci. Technol. 8, 535 (1997).
15. D. E. Bornside, Ph.D. thesis, University of Minnesota, 1988.
16. A. G. Emslie, T. Bonner, and L. G. Peck, J. Appl. Phys. 29, 858 (1958).
17. J. W. Rauscher, R. E. Kelly, and J. D. Cole, J. Appl. Mech. 40,43 (1973).
18. A. F. Charwat, R. E. Kelly, and C. Gazley, J. Fluid Mech. 53, 227 (1972).
19. S. Matsumoto, S. K. Salto, and Y. Takashima, J. Chem. Eng. Jpn. 6, 503 (1973).
20. L. A. Dorfman, Inzh.-Fiz. Zh. 12, 309 (1967).
21. S. Matsumoto, Y. Takashima, T. Kamiya, A. Kayano, and Y. Ohta, Ind. Eng. Chem. Fundam. 21, 198 (1982).
22. D. Meyerhofer, J. Appl. Phys. 49, 3993 (1978).
23. S. A. Jenekhe, Ind. Eng. Chem. Fundam. 23, 425 (1984).
24. P. C. Sukanek, J. Imaging Sci. Technol. 11, 184 (1985).
25. S. A. Jenekhe and S. B. Schuldt, Ind. Eng. Chem. Fundam. 23, 432 (1984).
26. S. A. Jenekhe and S. B. Schuldt, Ind. Eng. Chem. Fundam. 33, 135 (1985).
27. C. J. Lawrence, Phys. Fluids 31, 2786 (1988).
28. C. J. Lawrence, Phys. Fluids A 2, 453 (1990).
29. W. L. Daughton and F. L. Givens, J, Electrochem. Soc. 129, 173 (1982).
30. J. J. Rehg and B. G. Higgins, AIChE. J. 38, 489 (1992).
31. B. T. Chen, Polym. Eng. Sci. 23, 399 (1983).
32. B. D. Washo, IBM J. Res. Dev. 21, 190 (1977).
33. P. C. Sukanek, J. Electrochem. Soc. 138, 1712 (1991).
34. S. Shimoji, J. Appl. Phys. 66, 2712 (1989).
35. R. K. Yonkoski and D. S. Soane, J. Appl. Phys. 72, 725 (1992).
36. K. Vorotilov, V. Petrovsky, and V. Vasiljev, J. Sol-Gel Sci. Technol. 5, 173 (1995).
37. S. S. Prakash, C. J. Brinker, A. J. Hurd, and S. M. Rao, Nature (London) 374, 439 (1995).
38. S. S. Prakash, C. J. Brinker, and A. J. Hurd, J. Non-Cryst. Solids 190, 264 (1995).
39. S. S. Prakash, C. J. Brinker, A. J. Hurd, and S. M. Rao, Mater. Res. Soc. Symp. Proc. 371, 205 (1995).