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Volumn 71, Issue 3 SPEC., 2003, Pages 361-376
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Can plasma experiments unravel microscopic surface processes in thin film growth and erosion? Implications of particle-beam experiments on the understanding of a-C:H growth
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Author keywords
Growth mechanism; Ions surface interaction; Plasma CVD; Radical beam; Sticking probability; Thin film growth and erosion
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Indexed keywords
EROSION;
FILM GROWTH;
LOW TEMPERATURE EFFECTS;
PARTICLE BEAMS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
LOW-TEMPERATURE PLASMAS;
PLASMAS;
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EID: 0037454455
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(02)00764-9 Document Type: Conference Paper |
Times cited : (9)
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References (60)
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