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Volumn 71, Issue 3 SPEC., 2003, Pages 361-376

Can plasma experiments unravel microscopic surface processes in thin film growth and erosion? Implications of particle-beam experiments on the understanding of a-C:H growth

Author keywords

Growth mechanism; Ions surface interaction; Plasma CVD; Radical beam; Sticking probability; Thin film growth and erosion

Indexed keywords

EROSION; FILM GROWTH; LOW TEMPERATURE EFFECTS; PARTICLE BEAMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

EID: 0037454455     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00764-9     Document Type: Conference Paper
Times cited : (9)

References (60)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.