Hydrogen elimination as a key step for the formation of polymerlike hydrocarbon films

Journal of Applied Physics

Volumn 90, Issue 7, 2001, Pages 3585-3594

  Meier, Matthias ^a   Von Keudell, Achim ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035477611     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1397285     Document Type: Article

References (33)

1. A. H. Lettington, Philos. Trans. R. Soc. London 342, 287 (1993).
2. A. Bubenzer, B. Dischler, G. Brandt, and P. Koidl, J. Appl. Phys. 54, 4590 (1983).
3. A. Grill, Diamond Relat. Mater. 8, 428 (1999).
4. P. Pecher and W. Jacob, Appl. Phys. Lett. 73, 31 (1998).
5. A. von Keudell, T. Schwarz-Selinger, M. Meier, and W. Jacob, Appl. Phys. Lett. 76, 676 (2000).
6. A. von Keudell, T. Schwarz-Selinger, M. Meier, and W. Jacob, Appl. Phys. Lett. 77, 459 (2000).
7. A. von Keudell, T. Schwarz-Selinger, and W. Jacob, J. Appl. Phys. 89, 2979 (2001).
8. T. Schwarz-Selinger, A. von Keudell, and W. Jacob, J. Vac. Sci. Technol. A 18, 995 (2000).
9. T. Schwarz-Selinger, V. Dose, W. Jacob, and A. von Keudell, J. Vac. Sci. Technol. A 19, 101 (2001).
10. T. Schwarz-Selinger, A. von Keudell, and W. Jacob, J. Appl. Phys. 86, 3988 (1999).
11. D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975).
12. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarised Light (Elsevier Science, Amsterdam, 1977).
13. B. Dischler, A. Bubenzer, and P. Koidl, Solid State Commun. 48, 105 (1983).
14. M. Katiyar and J. R. Abelson, J. Vac. Sci. Technol. A 13, 2005 (1995).
15. J. Küppers, Surf. Sci. Rep. 22, 249 (1995).
16. A. von Keudell (unpublished).
17. J. C. Phillips, Phys. Rev. Lett. 42, 1151 (1979).
18. J. C. Angus and F. Jansen. J. Vac. Sci. Technol. A 6, 1778 (1988).
19. S. J. Harris and D. G. Goodwin, J. Phys. Chem. 97, 23 (1993).
20. B. Garrison, E. Dawnkaski, D. Srivastava, and D. Brenner, Science 255, 835 (1992).
21. H. Tamura et al., Phys. Rev. B 62, 16995 (2000).
22. J. Fox and A. Martin, Proc. R. Soc. London, Ser. A 175, 208 (1940).
23. A. von Keudell and W. Jacob, J. Appl. Phys. 79, 1092 (1996).
24. C. Wild, P. Koidl, and J. Wagner, Proceedings E-MRS Symposium (Les Editions de Physique, Paris, 137 (1987), Vol. 17.
25. P. Koidl, C. Wild, R. Locher, and R. Sah, in NATO ASI Series B, edited by R. E. Clausing, L. L. Horton, J. C. Angus, and P. Koidl (Plenum, New York, 1991), Vol. 266, p. 243.
26. A. Grill and V. Patel, Diamond Relat. Mater. 4, 62 (1994).
27. J. Behnisch, F. Mehdorn, A. Holländer, and H. Zimmermann, Surf. Coat. Technol. 98, 875 (1998).
28. C. Oehr et al., Surf. Coat. Technol. 116-119, 25 (1999).
29. W. Modie;ller and B. M. U. Scherzer, Appl. Phys. Lett. 50, 1870 (1987).
30. W. Jacob, Thin Solid Films 326, 1 (1998).
31. J. W. A. M. Gielen et al., J. Appl. Phys. 80, 5986 (1996).
32. J. W. A. M. Gielen, M. C. M. van de Sanden, and D. Schram, Appl. Phys. Lett. 69, 152 (1996).
33. J. W. A. M. Gielen, W. M. M. Kessels, M. C. M. van de Sanden, and D. Schram, J. Appl. Phys. 82, 2643 (1997).