Hydrogen-induced chemical erosion of a-C:H thin films: Product distribution and temperature dependence

Journal of Physical Chemistry B

Volumn 105, Issue 26, 2001, Pages 6194-6201

  Zecho, Thomas ^a   Brandner, Birgit D ^a   Biener, Jürgen ^b   Küppers, Jürgen ^a,b  

^a UNIVERSITY OF BAYREUTH   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL EROSION;

EROSION; HYDROGEN; ION BEAM ASSISTED DEPOSITION; MASS SPECTROMETRY; THIN FILMS;

CARBON;

EID: 0035812112     PISSN: 10895647     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp010013e     Document Type: Article

References (38)

1. Grill, A. IBM J. Res. Develop. 1999, 43, 147.
2. Winter J. J. Nucl. Mater. 1989, 161, 265.
3. Vietzke, E.; Haasz, A.A. In Physical Processes of the Interaction of Fusion Plasmas with Solids; Hofer, W.O., Roth, J., Eds.; Academic Press: San Diego, 1996; Chapter 4.
4. Angus, J.C. Thin Solid Films 1986, 142, 145.
5. Robertson, J. Adv. Phys. 1986, 35, 317.
6. Robertson, J. Diamond and Diamond-Like Films and Coatings; Clausing R.E., Ed.; Plenum Press: New York, 1991; p 331.
7. Angus, J.C.; Hayman, C.C. Science 1988, 241, 913.
8. Jacob, W. Thin Solid Films 1998, 326, 1.
9. Mattas, R.F.; Smith, D.L.; Wu, C.H.; Kuroda, T.; Shatalov, G. J. Nucl. Mater. 1992, 191-194, 139.
10. Küppers, J. Surf. Sci. Rep. 1995, 22, 249.
11. Vietzke, E.; Flaskamp, K.; Philipps, V.; Esser, G.; Wienhold, P.; Winter, J. J. Nucl. Mater. 1987, 145-147, 443.
12. Vietzke, E.; Philipps, V.; Flaskamp, K.; Wild, Ch. Amorphous Hydrogenated Carbon Films; Koidl, P., Oelhafen, P., Eds.; European Materials Research Society Symposia Proceedings XVII, Les Editions de Physique: Paris, 1987, 351.
13. Vietzke, E.; Philipps, V.; Flaskamp, K.; Koidl, P.; Wild, Ch. Surf Coat. Technol. 1991, 47, 156.
14. Schenk, A.; Biener, J.; Winter, B.; Lutterloh, C.; Schubert, U.A.; Küppers, J. Appl. Phys. Lett. 1992, 61, 2414.
15. Biener, J.; Schenk, A.; Winter, B.; Lutterloh, C.; Schubert, U.A.; Küppers, J. Surf. Sci. 1993, 291, L725.
16. Biener, J.; Schenk, A.; Winter, B.; Küppers, J. J. Electron Spectrosc. Relat. Phenom. 1993, 64/65, 331.
17. Biener, J.; Schenk, A.; Winter, B.; Schubert, U.A.; Lutterloh, C.; Küppers, J. Phys. Rev. B 1994, 49, 17307.
18. Schenk, A.; Winter, B.; Biener, J.; Lutterloh, C.; Schubert, U.A.; Küppers, J. J. Appl. Phys. 1995, 77, 2462.
19. Biener, J.; Schubert, U.A.; Scheuk, A.; Winter, B.; Lutterloh, C.; Küppers, J. J. Chem. Phys. 1993, 99, 3125.
20. Biener, J.; Schenk, A.; Winter, B.; Lutterloh, C.; Schubert, U.A.; Küppers, J. Surf. Sci. 1994, 307-309, 228.
21. Lutterloh, C.; Schenk, A.; Biener, J.; Winter, B.; Küppers, J. Surf. Sci. 1994, 316, L1039.
22. Horn, A.; Schenk, A.; Biener, J.; Winter, B.; Lutterloh, C.; Wittmann, M.; Küppers, J. Chem. Phys. Lett. 1994, 231, 193.
23. Wittmann, M.; Küppers, J. J. Nucl. Mater. 1996, 227, 186.
24. Zecho, Th.; Brandner, B.D.; Biener, J.; Küppers, J. J. Phys. Chem. B, in press.
25. Schwarz-Selinger, T.; von Keudell, A.; Jacob, W. J. Vac. Sci. Technol. A 2000, 18, 995.
26. Musket, R.G.; McLean, W.; Colmenares, C.A.; Makowiecki, D.M.; Siekhaus, W. J. Appl. Surf. Sci. 1982, 10, 143.
27. Cornu, A.; Massot, R. Compilation of Mass Spectral Data; Heyden: London, 1979.
28. Dischler, B.; Bubenzer, A.; Koidl, P. Solid State Commun. 1983, 48, 105.
29. Dischler, B.; Bubenzer, A.; Koidl, P. Appl. Phys. Lett. 1983, 42, 636.
30. Couderc, P.; Catherine, Y. Thin Solid Films 1987, 146, 93.
31. Stief, R.; Schäfer, J.; Ristein, J.; Ley, L.; Beyer, W. J. Non-Cryst. Solids 1996, 198-200, 636.
32. Ristein, J.; Stief, R.T.; Ley, L.; Beyer, W. J. Appl. Phys. 1998, 84, 3836.
33. Roth, J.; García-Rosales, C. Nucl. Fusion 1996, 36, 1647.
34. Lide, D.R. CRC Handbook of Chemistry and Physics, 76th ed.; CRC Press: Boca Raton, 1995; pp 9-63.
35. Bauld, N.L. Radicals, Ion Radicals, and Triplets; Wiley-VCR: New York, 1997; p 6.
36. Shimizu, I. J. Non-Cryst. Solids 1989, 114, 145.
37. Shirai, H.; Das, D.; Hanna, J.; Schimizu, I. Appl. Phys. Lett. 1991, 59, 1096.
38. Zecho, Th.; Brandner, B.D.; Biener, J.; Küppers, J. J Phys. Chem. B, submitted.