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Volumn 308-309, Issue 1-4, 1997, Pages 195-198
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Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry
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Author keywords
Diamond like carbon; In situ ellipsometry; Ion thin film interaction; Plasma film deposition
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELECTRON CYCLOTRON RESONANCE;
ELLIPSOMETRY;
FILM GROWTH;
ION BOMBARDMENT;
PHASE EQUILIBRIA;
RELAXATION PROCESSES;
PLASMA CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
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EID: 0031250204
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00423-9 Document Type: Article |
Times cited : (3)
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References (20)
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