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Volumn 308-309, Issue 1-4, 1997, Pages 195-198

Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry

Author keywords

Diamond like carbon; In situ ellipsometry; Ion thin film interaction; Plasma film deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; FILM GROWTH; ION BOMBARDMENT; PHASE EQUILIBRIA; RELAXATION PROCESSES;

EID: 0031250204     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00423-9     Document Type: Article
Times cited : (3)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.