Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Journal of Materials Research

Volumn 11, Issue 1, 1996, Pages 221-228

  Andry, P S ^a   Pastel, P W ^a   Varhue, W J ^a  

^a University of Vermont   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENZENE; CARBON; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; ENERGY GAP; MASS SPECTROMETRY; METHANE; PLASMAS; RAMAN SCATTERING;

DIAMOND LIKE CARBON FILM; FILM PROPERTIES; INTEGRATED CARBON HYDROGEN STRETCH ABSORPTION; LANGMUIR PROBE MEASUREMENTS; OPTICAL EMISSION SPECTROSCOPY; OPTICAL ENERGY GAP; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA STREAM; TOTAL HYDROGEN CONTENT;

THIN FILMS;

EID: 0029756441     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0027     Document Type: Review

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