Chemical sputtering of hydrocarbon films by low-energy Ar+ ion and H atom impact

Nuclear Fusion

Volumn 42, Issue 12, 2002, Pages

  Hopf, C ^a   Von Keudell, A ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FUSION REACTOR DIVERTORS; HYDROCARBONS; ION BOMBARDMENT; OPTICAL FILMS; SPUTTERING;

CHEMICAL SPUTTERING;

FUSION REACTIONS;

EID: 0036909725     PISSN: 00295515     EISSN: None     Source Type: Journal    
DOI: 10.1088/0029-5515/42/12/101     Document Type: Article

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