Correlation between the chemical bonding and the physical properties of the CNx films obtained by pulsed laser deposition from C targets in low-pressure N2

Materials Science and Engineering: B

Volumn 97, Issue 3, 2003, Pages 251-257

  Gyorgy E ^a   Mihailescu, I N ^a   Baleva, M ^b   Abrashev, M ^b   Trifonova, E P ^b   Szekeres, A ^c   Perrone, A ^d  

^a INSTITUTE OF ATOMIC PHYSICS   (Romania)

^b UNIVERSITY OF SOFIA   (Bulgaria)

^c INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^d NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

CNx thin films structure; Hardness; Optical properties; Pulsed laser deposition

Indexed keywords

CARBON NITRIDE; CHEMICAL BONDS; COMPRESSIBILITY OF SOLIDS; HARDNESS; PHYSICAL PROPERTIES; PULSED LASER DEPOSITION;

LASER FLUENCE;

THIN FILMS;

EID: 0037442927     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00591-3     Document Type: Article

References (32)

1. Chrisey D., Hubler G.K. Pulsed Laser Deposition of Thin Films. 1994;Wiley, New York.
2. I.N. Mihailescu, E. Gyorgy, Pulsed Laser Deposition: An Overview, in: T. Asakura (ICO President) (Ed.), Fourth International Commission for Optics (ICO) Book, Trends in Optics and Photonics, Springer Series in Optical Science, (1999) 201-214.
3. Liu A.Y., Cohen M.L. Science. 245:1989;841.
4. Liu A.Y., Cohen M.L. Phys. Rev. B41:1990;10727.
5. D'Anna E., Luches A., Perrone A., Aquaviva S., Alexandrescu R., Mihailescu I.N., Zemek J., Majni G. Appl. Surf. Sci. 106:1996;126.
6. Caricato A.P., Leggieri G., Luches A., Perrone A., Gyorgy E., Mihailescu I.N., Popescu M., Barucca G., Mengucci P., Zemek J., Trchova M. Thin Solid Films. 307:1997;54.
7. De Giorgi M.L., Leggieri G., Luches A., Martino M., Perrone A., Zocco A., Barucca G., Majni G., Gyorgy E., Mihailescu I.N., Popescu M. Appl. Surf. Sci. 127/129:1998;481.
8. Gyorgy E., Nelea V., Mihailescu I.N., Perrone A., Pelletier H., Cornet A., Ganatsios S., Werckmann J. Thin Solid Films. 388:2001;93.
9. Gyorgy E., Mihailescu I.N., Baleva M., Trifonova E.P., Abrashev M., Darakchieva V., Zocco A., Perrone A. J. Mater. Sci. 36:2001;1951.
10. Baleva M., Mateeva E., Trifonova E.P. J. Mater. Sci. 34:1999;795.
11. Nakayama N., Tsuehiya Y., Tamada S., Kosuge K., Nagata S., Takahiro K., Yamaguchi S. Jap. J. Appl. Phys. Lett. 32:1993;L1465.
12. Doyle T.E., Dennison J.R. Phys. Rev. B51:1995;196.
13. Escobar-Alarcon L., Villarreal-Barajas J.E., Camps E., Muhl S., Haro-Poniatowski E., Romero S., Salinas B. Mater. Sci. Eng. B90:2002;79.
14. Bhattachayya S., Hong J., Turban G. J. Appl. Phys. 83:1998;3917.
15. Barucca G., Majni G., Mengucci P., Leggieri G., Luches A., Martino M., Perrone A. J. Appl. Phys. 86:1999;2014.
16. Cheng Y.H., Sun Z.H., Tay B.K., Lan S.P., Qiao X.L., Chen J.G., Wu Y.P., Xie C.S., Wang Y.Q., Xu D.S., Mo S.B., Sun Y.B. Appl. Surf. Sci. 182:2001;32.
17. Gonzalez P., Soto R., Leon B., Perez-Amor M. J. Vac. Sci. Technol. A19:2001;499.
18. Szorenyi T., Fuchs C., Fogarassy E., Hommet J., Le Normand F. Surf. Coat. Technol. 125:2000;308.
19. Lu Y.F., Ren Z.M., Song W.D., Chan D.S.H. J. Appl. Phys. 84:1998;2133.
20. Lu Y.F., Ren Z.M., Chong T.C., Cheong B.A., Pang S.I., Wang J.P., Li K. J. Appl. Phys. 86:1999;4954.
21. Chia R.W.J., Li E., Sugi S., Li G.G., Zhuv H., Forouhi A.R., Bloomer I. Thin Solid Films. 308-309:1997;284.
22. Tsubouchi N., Horino Y., Enders B., Chayahara A., Kinomura A., Fujii K. Appl. Phys. Lett. 72:1998;1412.
23. Wang X., Martin P.J. Appl. Phys. Lett. 68:1996;1177.
24. Monclus M.A., Cameron D.C., Chowdhurry A.K.M.S. Thin Solid Films. 341:1999;94.
25. Yao H., Ching W.Y. Phys. Rev. B50:1994;11231.
26. Corkill J.L., Cohen M.L. Phys. Rev. B48:1993;17622.
27. Ng Y.M., Ong C.W., Zhao X.A., Choy C.L. J. Vac. Sci. Technol. A17:1999;584.
28. Neuville S., Matthews A. MRS Bull. 22:1997;22.
29. E. Fogarassy, T. Szorenyi, F. Antoni, J.P. Stoquert, G. Pirio, J. Olivier, P.Legagneux, P. Boher, O. Pons-Y-Moll, Appl. Surf. Sci. 197-198 (2002) 316.
30. Riedo E., Comin F., Chevrier J., Bonnot A.M. J. Appl. Phys. 88:2000;4365.
31. Weich F., Widany J., Frauenheim Th. Phys. Rev. Lett. 78:1997;3326.
32. Hu J., Yang P., Lieber C.M. Phys. Rev. B57:1998;R3185.