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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 499-502

Comparison of pulsed laser deposition CNx films grown from organic and inorganic targets

(4) Gonzalez P a Soto, R a Leon B a Perez Amor M a

a UNIVERSITY OF VIGO (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CARBON NITRIDE; CHEMICAL BONDS; ENERGY DISPERSIVE SPECTROSCOPY; EXCIMER LASERS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; LASER ABLATION; PULSED LASER DEPOSITION; TEMPERATURE PROGRAMMED DESORPTION; THERMODYNAMIC STABILITY;

THERMAL DESORPTION SPECTROSCOPY; THERMAL EFFUSION;

INORGANIC COATINGS;

EID: 0035273359 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1344908 Document Type: Article

Times cited : (2)

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