Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma

Journal of Applied Physics

Volumn 90, Issue 5, 2001, Pages 2158-2161

  Bowden, M D ^a   Tabata, R ^a   Suanpoot, P ^a   Uchino, K ^a   Muraoka, K ^a   Noguchi, M ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b FUKUOKA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038844208     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1398775     Document Type: Article

References (9)

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