Model and probe measurements of inductively coupled CF 4 discharges

Journal of Applied Physics

Volumn 92, Issue 4, 2002, Pages 1780-1787

  Kimura, T ^a   Ohe, K ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL DIRECTION; DEGREE OF DISSOCIATION; EDGE PROFILE; ELECTRON ENERGY PROBABILITY FUNCTIONS; ELECTRONEGATIVE PLASMAS; GLOBAL MODELS; INDUCTIVELY-COUPLED; ION DISTRIBUTIONS; MAXWELLIAN DISTRIBUTION; NUMBER DENSITY; PARABOLIC PROFILES; PLASMA PARAMETER; PLASMA POTENTIAL; PRESSURE DEPENDENCE; PRESSURE RANGES; PROBE MEASUREMENTS; RADIAL DIRECTION;

CARRIER CONCENTRATION; DISSOCIATION; ELECTROMAGNETIC INDUCTION; ELECTRON DENSITY MEASUREMENT; ELECTRON TEMPERATURE; PLASMAS;

ELECTRIC DISCHARGES;

EID: 0037103451     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1491023     Document Type: Article

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