Gap length dependence of electron energy distribution in low-pressure Ar capacitively coupled RF discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 3 A, 2000, Pages 1351-1357

  Kimura, Takashi ^a   Kaga, Kouji ^a   Ohe, Kazuyuki ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Capacitively coupled ar rf discharge; Electron energy distribution function; Electron electron Coulomb interaction; Joule heating; Langmuir probe measurement; Non maxwellian; Stochastic heating

Indexed keywords

ARGON; ELECTRONIC DENSITY OF STATES; ENERGY GAP; HEATING; HIGH ENERGY PHYSICS; KINETIC THEORY; PRESSURE;

ELECTRON ENERGY DISTRIBUTION FUNCTION; ELECTRON-ELECTRON COULOMB INTERACTION; GAP LENGTH DEPENDENCE; JOULE HEATING; LANGMUIR PROBE MEASUREMENT; STOCHASTIC HEATING;

GLOW DISCHARGES;

EID: 0033742217     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.1351     Document Type: Article

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