Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4404-4415

  Bogaerts, Annemie ^a   Gijbels, Renaat ^a   Goedheer, Wim ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BATTERIES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRONS; FLUIDS; GLOW DISCHARGES; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PRESSURE; SPECTROSCOPY;

ANALYTICAL SPECTROSCOPY; CAPACITIVELY COUPLED RADIO FREQUENCY GLOW DISCHARGE; ELECTRIC FIELD DISTRIBUTION; FLUID MODEL; GAS PRESSURE; HYBRID MODELLING; POISSON EQUATION;

ARGON;

EID: 0033157783     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4404     Document Type: Article

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