Self-consistent particle simulation of RF discharge in argon based on detailed collision data

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 1023-1025

  Nanbu, K ^a   Kitatani, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Particle simulation; PIC method; Plasma; RF discharge

Indexed keywords

APPROXIMATION THEORY; ARGON; ATOMS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC CHARGE; ELECTRONS; IONIZATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; NUMERICAL ANALYSIS; PLASMA COLLISION PROCESSES;

CHARGE EXCHANGE COLLISIONS; DETAILED COLLISION DATA; ELECTRON ATOM COLLISIONS; IONIZING COLLISIONS; PARTICLE IN CELL MONTE CARLO METHOD; RADIOFREQUENCY DISCHARGE; SELF CONSISTENT PARTICLE SIMULATION;

GLOW DISCHARGES;

EID: 0030168528     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00116-9     Document Type: Article

References (13)

1. D B Graves, IEEE Trans Plasma Sci, 22, 31 (1994).
2. D B Graves and K F Jensen, IEEE Trans Plasma Sci, 14, 78 (1986).
3. T Makabe, N Nakano and Y Yamaguchi, Phys Rev, 45, 2520 (1993).
4. M J Kushner, J Appl Phys, 54, 4958 (1983).
5. D Vender and R W Boswell, IEEE Trans Plasma Sci, 18, 725 (1990).
6. M Surendra and D B Graves, IEEE Trans Plasma Sci, 19, 144 (1991).
7. H W Trombley, F L Terry and M E Elta, IEEE Trans Plasma Sci, 19, 158 (1991).
8. A Date, K Kitamori, Y Sakai and H Tagashira, J Phys D: Appl Phys, 25, 442 (1992).
9. C K Birdsall, IEEE Trans Plasma Sci, 19, 65 (1991).
10. K Nanbu and S Uchida, in Rarefied Gas Dynamics 19, Vol 1 (Edited by J Harvey and G Lord), p 601. Oxford University Press, Oxford (1995).
11. K Kosaki and M Hayashi, Prep National Meeting of the Institute of Electrical Engineering Japan (1992) (in Japanese).
12. K Nanbu, Jpn J Appl Phys, 33, 4752 (1994).
13. K Nanbu and Y Kitatani, J Phys D: Appl Phys, 28, 324 (1995).