Surface and gas-phase observations of Ar-diluted c-C4F8 plasma by using real-time infrared spectroscopy and planar laser-induced fluorescence

Journal of Applied Physics

Volumn 93, Issue 3, 2003, Pages 1403-1408

  Ishikawa, Kenji ^a   Hayashi, Shigenori ^a,b   Sekine, Makoto ^a,c  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b PANASONIC CORPORATION   (Japan)

^c TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; EXCIMER LASERS; FLUORESCENCE; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER TUNING; PLASMA DENSITY;

PLASMA DISCHARGES;

INDUCTIVELY COUPLED PLASMA;

EID: 0037322363     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1536740     Document Type: Article

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