Cross section measurements for electron-impact dissociation of C4F8 into neutral and ionic Radicals

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 6 A, 1997, Pages 3730-3735

  Toyoda, Hirotaka ^a   Iio, Makoto ^a   Sugai, Hideo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Dissociation cross section; Dissociative ionization cross section; Electron impact; Neutral radical; Octafluorocyclobutane

Indexed keywords

DUAL ELECTRON BEAM DEVICE; ELECTRON IMPACT DISSOCIATION; NEUTRAL RADICALS; OCTAFLUORO CYCLOBUTANE; QUADRUPOLE MASS SPECTROMETER; THRESHOLD ENERGIES;

DISSOCIATION; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; IONIZATION; MASS SPECTROMETRY;

BUTANE;

EID: 0031167544     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3730     Document Type: Article

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