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Volumn 19, Issue 6, 2001, Pages 2829-2833

Dual exposure glass layer suspended structures: A simplified fabrication process for suspended nanostructures on planar substrates

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; GLASS; INTERFEROMETRY; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SUBSTRATES; THICKNESS MEASUREMENT;

MECHANICAL PIEZOELECTRIC DRIVING FORCE; OPTICAL INTERFEROMETRIC DETECTION; SPIN ON GLASS;

NANOTECHNOLOGY;

EID: 0035519502 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1417546 Document Type: Article

Times cited : (14)

References (15)

1
- 0034711368
- H. G. Craighead, Science 290, 1532 (2000).
- (2000) Science , vol.290 , pp. 1532
- Craighead, H.G.¹

2
- 0032138470
- J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
- (1998) Proc. IEEE , vol.86 , pp. 1552
- Bustillo, J.M.¹ Howe, R.T.² Muller, R.S.³

3
- 0018029736
- K. E. Peterson, IEEE Trans. Electron Devices 25, 1241 (1978).
- (1978) IEEE Trans. Electron Devices , vol.25 , pp. 1241
- Peterson, K.E.¹

4
- 33847581555
- private communication, preprint
- S. D. Penn, G. M. Harry, A. M. Gretarsson, S. E. Kittelberger, P. R. Saulson, J. J. Schiller, J. R. Smith, and S. O. Swords (private communication, preprint).
- Penn, S.D.¹ Harry, G.M.² Gretarsson, A.M.³ Kittelberger, S.E.⁴ Saulson, P.R.⁵ Schiller, J.J.⁶ Smith, J.R.⁷ Swords, S.O.⁸

5
- 0002053947
- H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 69
- Namatsu, H.¹ Takahashi, Y.² Yamazaki, K.³ Yamaguchi, T.⁴ Nagase, M.⁵ Kurihara, K.⁶

6
- 11744364248
- H. Namatsu, M. Nagase, T. Yamaguchi, K. Yamazaki, and K. Kurihara, J. Vac. Sci. Technol. B 16, 3315 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3315
- Namatsu, H.¹ Nagase, M.² Yamaguchi, T.³ Yamazaki, K.⁴ Kurihara, K.⁵

7
- 0034318652
- F. C. M. J. M. van Delft, J. P. Weterings, A. K. van Langen-Suurling, and H. Romijn, J. Vac. Sci. Technol. B 18, 3419 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3419
- Van Delft, F.C.M.J.M.¹ Weterings, J.P.² Van Langen-Suurling, A.K.³ Romijn, H.⁴

8
- 85087228558
- H. Liou, E. Dehate, J. Duel, and F. Dall, Mater. Res. Soc. Symp. Proc. 612, D5.12 (2000).
- (2000) Mater. Res. Soc. Symp. Proc. , vol.612
- Liou, H.¹ Dehate, E.² Duel, J.³ Dall, F.⁴

9
- 33847595764
- HSQ is commercially available from Dow Corning as FOx-n, and is used as an interlayer dielectric in semiconductor manufacturing
- HSQ is commercially available from Dow Corning as FOx-n, and is used as an interlayer dielectric in semiconductor manufacturing.

10
- 0033320125
- I. Jafri, H. Busta, and S. Walsh, Proc. SPIE 3880, 51 (1999).
- (1999) Proc. SPIE , vol.3880 , pp. 51
- Jafri, I.¹ Busta, H.² Walsh, S.³

11
- 11744365184
- D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3821 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3821
- Carr, D.W.¹ Sekaric, L.² Craighead, H.G.³

12
- 0035858264
- M. Zalalutinov, A. Olkhovets, A. Zehnder, B. Illic, D. Czaplewski, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 78, 3142 (2001).
- (2001) Appl. Phys. Lett. , vol.78 , pp. 3142
- Zalalutinov, M.¹ Olkhovets, A.² Zehnder, A.³ Illic, B.⁴ Czaplewski, D.⁵ Craighead, H.G.⁶ Parpia, J.M.⁷

13
- 0042760419
- D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 920
- Carr, D.W.¹ Evoy, S.² Sekaric, L.³ Craighead, H.G.⁴ Parpia, J.M.⁵

14
- 33847582257
- private communication, preprint
- L. Sekaric and H. G. Craighead (private communication, preprint).
- Sekaric, L.¹ Craighead, H.G.²

15
- 0032114871
- B. R. Harkness, K. Takeuchi, and M. Tachikawa, Macromolecules 31, 4798 (1998).
- (1998) Macromolecules , vol.31 , pp. 4798
- Harkness, B.R.¹ Takeuchi, K.² Tachikawa, M.³

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