Inverse problem theory in the optical depth profilometry of thin films

Review of Scientific Instruments

Volumn 73, Issue 12, 2002, Pages 4057-4141

  Power, J F ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED SPECTROSCOPY; INVERSE PROBLEMS; LIGHT ABSORPTION; NONDESTRUCTIVE EXAMINATION; PHOTOLUMINESCENCE; PROFILOMETRY;

OPTICAL DEPTH PROFILOMETRY;

THIN FILMS;

EID: 0036951738     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1517054     Document Type: Review

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