Depth profiling of stratified layers using variable-angle ATR

Applied Spectroscopy

Volumn 50, Issue 8, 1996, Pages 1082-1088

  Shick, Robert A ^a   Koenig, Jack L ^a   Ishida, Hatsuo ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Concentration profile; Depth profile; Internal reflection spectroscopy; Polarization effects; Variable angle ATR

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT POLARIZATION; LIGHT REFLECTION;

ATTENUATED TOTAL REFLECTANCE (ATR); DEPTH PROFILING; INTERNAL REFLECTION SPECTROSCOPY; PROFILOMETERS;

MOLECULAR SPECTROSCOPY;

EID: 0030204998     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702963905411     Document Type: Article

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