Optical depth profiling by attenuated total reflection fourier transform infrared spectroscopy: A new approach

Applied Spectroscopy

Volumn 50, Issue 9, 1996, Pages 1187-1195

  Ekgasit, Sanong ^a   Ishida, Hatsuo ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

ATR FT IR spectroscopy; Attenuated total reflection fourier transform infrared spectroscopy; Depth profiling; Linear equation of absorptance; Multiple angle ATR; Nonlinear fitting; Variable angle ATR

Indexed keywords

CURVE FITTING; LIGHT ABSORPTION; REFRACTIVE INDEX;

ABSORPTION LINEAR EQUATIONS; ATTENUATED TOTAL REFLECTION FOURIER TRANSFORM INFRARED SPECTROSCOPY; MULTIPLE ANGLE ATTENUATED TOTAL REFLECTION; NONLINEAR FITTINGS; OPTICAL DEPTH PROFILING;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 0030230098     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702963905178     Document Type: Article

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