Characteristics of a 13.56 Mhz radiofrequency-driven multicusp ion source

Plasma Sources Science and Technology

Volumn 11, Issue 4, 2002, Pages 389-396

  Boonyawan, Dherawan ^a   Chiraphatpimol, N ^a   Vilaithong, Thirapat ^a  

^a CHIANG MAI UNIVERSITY   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC POTENTIAL; ELECTRONS; MAGNETS; PLASMA DENSITY; QUARTZ;

MULTICUSP ION SOURCES;

ION SOURCES;

EID: 0036861411     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/4/305     Document Type: Article

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