A 13.56 MHz multicusp ion source for gaseous ion-beam production

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 314-317

  Boonyawan, Dheerawan ^a   Suanpoot, Pradoong ^a   Vilaithong, Thiraphat ^a  

^a CHIANG MAI UNIVERSITY   (Thailand)

Author keywords

RF driven multicusp ion source

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; CURRENT DENSITY; ELECTRON SOURCES; ION BEAMS; LEAKAGE CURRENTS; MAGNETS; PLASMA APPLICATIONS; SAMARIUM ALLOYS;

INDUCTIVELY-COUPLED PLASMAS (ICP); ION-CURRENT DENSITY; MULTICUSP ION SOURCES; SOFTWARE PACKAGE MAGNUS;

ION SOURCES;

EID: 0033076450     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00742-7     Document Type: Article

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