Power absorption characteristics of an inductively coupled plasma discharge

IEEE Transactions on Plasma Science

Volumn 27, Issue 3, 1999, Pages 676-681

  Yang, J G ^a   Yoon, N S ^a   Kirn, B C ^a   Choi, J H ^a   Lee, G S ^a   Hwang, S M ^a  

^a Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRIC RESISTANCE; INDUCTION HEATING; PRESSURE EFFECTS;

INDUCTIVELY COUPLED PLASMA DISCHARGES;

PLASMAS;

EID: 0032652767     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.774671     Document Type: Article

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