Performance of multicusp plasma ion source for focused ion beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3194-3197

  Scipioni, L ^a   Stewart, D ^a   Ferranti, D ^a   Saxonis, A ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; INERT GASES; ION BEAM LITHOGRAPHY; ION IMPLANTATION; QUARTZ;

ION PROJECTION LITHOGRAPHY;

ION BEAMS;

EID: 0034316887     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1320797     Document Type: Article

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