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Volumn 5, Issue 3, 1996, Pages 363-370

Laboratory measurements and optimization of inductively coupled loop antenna plasma sources

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; IONIZATION OF GASES; LOOP ANTENNAS; MAGNETIC FIELD EFFECTS; PLASMA CONFINEMENT; PLASMA DENSITY; PRESSURE EFFECTS; TARGETS;

EID: 0030205107     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/003     Document Type: Article
Times cited : (8)

References (21)
  • 5
    • 0030204810 scopus 로고
    • Modelling and optimization of a spiral inductively coupled loop antenna plasma source
    • Intrator T and Menard J 1995 Modelling and optimization of a spiral inductively coupled loop antenna plasma source Plasma Sources Sci. Technol. 5 371
    • (1995) Plasma Sources Sci. Technol. , vol.5 , pp. 371
    • Intrator, T.1    Menard, J.2
  • 8
    • 5844220485 scopus 로고
    • An improved spiral loop antenna for inductively coupled plasma sources
    • presentation PD3
    • Intrator T, Menard J and Hershkowitz 1991 An improved spiral loop antenna for inductively coupled plasma sources 44th Annual Gaseous Electronics Conf. (Albuquerque, NM) presentation PD3 Intrator T and Menard J 1991 An improved spiral loop antenna for inductively coupled plasma sources IEEE Conf. 3-5 June
    • (1991) 44th Annual Gaseous Electronics Conf. (Albuquerque, NM)
    • Intrator, T.1    Menard, J.2    Hershkowitz3
  • 9
    • 0026373793 scopus 로고
    • An improved spiral loop antenna for inductively coupled plasma sources
    • Intrator T, Menard J and Hershkowitz 1991 An improved spiral loop antenna for inductively coupled plasma sources 44th Annual Gaseous Electronics Conf. (Albuquerque, NM) presentation PD3 Intrator T and Menard J 1991 An improved spiral loop antenna for inductively coupled plasma sources IEEE Conf. 3-5 June
    • (1991) IEEE Conf. 3-5 June
    • Intrator, T.1    Menard, J.2
  • 14
    • 5844296210 scopus 로고    scopus 로고
    • LAM Research Corporation 1992 Technical note TN-003
    • LAM Research Corporation 1992 Technical note TN-003
  • 21
    • 5844279733 scopus 로고
    • Design and initial tests of a low voltage stacked stripline fast wave launcher in the Phaedrus-T Tokamak
    • submitted
    • Probert P H, Oliva S, Winz G R, Hoffman D J, Caughman JBO and Gardner W L 1995 Design and initial tests of a low voltage stacked stripline fast wave launcher in the Phaedrus-T Tokamak Nucl. Fusion submitted
    • (1995) Nucl. Fusion
    • Probert, P.H.1    Oliva, S.2    Winz, G.R.3    Hoffman, D.J.4    Caughman, J.B.O.5    Gardner, W.L.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.