Global model of a radiofrequency H2 plasma in DENISE

Plasma Sources Science and Technology

Volumn 9, Issue 2, 2000, Pages 161-168

  Zorat, Roberto ^a   Goss, Jonathan ^b   Boilson, Deirdre ^a   Vender, David ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b UNIVERSITY OF EXETER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM; ELECTRIC DISCHARGES; HYDROGEN; ION SOURCES; MAGNETIC FIELDS; MATHEMATICAL MODELS; PLASMA DENSITY;

INDUCTIVELY COUPLED PLASMAS;

PLASMAS;

EID: 0033752181     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/2/308     Document Type: Article

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