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Volumn 69, Issue 2, 1998, Pages 1023-1025
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Quartz antenna for radio frequency ion source operation
a a a a a a a b b |
Author keywords
ANTENNAS; DESIGN; ION SOURCES; OPERATION; PLASMA PRODUCTION; POWER; QUARTZ; RF SYSTEMS
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Indexed keywords
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EID: 0011948055
PISSN: 00346748
EISSN: 10897623
Source Type: Journal
DOI: 10.1063/1.1148708 Document Type: Conference Paper |
Times cited : (4)
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References (5)
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