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Volumn 69, Issue 2, 1998, Pages 1023-1025

Quartz antenna for radio frequency ion source operation

Author keywords

ANTENNAS; DESIGN; ION SOURCES; OPERATION; PLASMA PRODUCTION; POWER; QUARTZ; RF SYSTEMS

Indexed keywords


EID: 0011948055     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148708     Document Type: Conference Paper
Times cited : (4)

References (5)
  • 2
    • 85024789651 scopus 로고    scopus 로고
    • (private communications)
    • D. Wutte (private communications).
    • Wutte, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.