Plasma-immersion ion implantation for diffusive treatment

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1-10

  Möller, Wolfhard ^a   Parascandola, Stefano ^a   Kruse, Olaf ^a   Günzel, Reinhard ^a   Richter, Edgar ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Diffusion; Ion implantation; Nitriding; Plasma immersion

Indexed keywords

ION IMPLANTATION; NITRIDING; NITROGEN; PLASMA APPLICATIONS; STAINLESS STEEL;

PLASMA-IMMERSION ION IMPLANTATION;

SURFACE TREATMENT;

DIFFUSION; ION IMPLANTATION; NITRIDING; STAINLESS STEEL;

EID: 0042275260     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00144-9     Document Type: Conference Paper

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