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Volumn 136, Issue 1-3, 2001, Pages 23-27
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Development of hybrid pulse plasma coating system
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
ELECTRIC POTENTIAL;
ION BEAMS;
ION IMPLANTATION;
MAGNETIC FIELD EFFECTS;
MICROWAVES;
PLASMA DENSITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA SOURCES;
PULSE GENERATORS;
INDUCTIVELY COUPLED PLASMAS;
PLASMA COATINGS;
PLASMA-BASED ION IMPLANTATION (PBII);
COATINGS;
COATING PROCESS;
PLASMA COATING;
PROTECTIVE AGENT;
VAPOR;
COATING;
CORROSION PROTECTION;
ION IMPLANTATION;
PLASMA TREATMENT;
VAPOR DEPOSITION;
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EID: 0035241903
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(00)01003-3 Document Type: Article |
Times cited : (7)
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References (14)
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