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Volumn 136, Issue 1-3, 2001, Pages 23-27

Development of hybrid pulse plasma coating system

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ELECTRIC POTENTIAL; ION BEAMS; ION IMPLANTATION; MAGNETIC FIELD EFFECTS; MICROWAVES; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; PULSE GENERATORS;

EID: 0035241903     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01003-3     Document Type: Article
Times cited : (7)

References (14)
  • 13
    • 0005978656 scopus 로고    scopus 로고
    • Spatial ion-species distributions in a large-volume ICP source
    • in press
    • S. Okuji, N. Sakudo, K. Hayashi, et al., Spatial ion-species distributions in a large-volume ICP source, Surf. Coat. Technol. (in press).
    • Surf. Coat. Technol.
    • Okuji, S.1    Sakudo, N.2    Hayashi, K.3
  • 14
    • 85031524880 scopus 로고    scopus 로고
    • DLC films formed by hybrid pulse plasma coating (HPPC) system
    • in press
    • K. Awazu, N. Sakudo, H. Yasui, et al., DLC films formed by hybrid pulse plasma coating (HPPC) system, Surf. Coat. Technol. (in press).
    • Surf. Coat. Technol.
    • Awazu, K.1    Sakudo, N.2    Yasui, H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.