Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2525-2530

  He, X M ^a   Bardeau, J F ^a   Walter, K C ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033457760     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581991     Document Type: Article

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