Observation of surface dissociation of low-energy polyatomic ions relevant to plasma processing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 290-293

  Sugai, H ^a   Mitsuoka, Y ^a   Toyoda, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032331271     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580984     Document Type: Article

References (16)

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