Stress in undoped and doped laser crystallized poly-Si

Journal of Applied Physics

Volumn 91, Issue 11, 2002, Pages 9128-9135

  Lengsfeld, P ^a   Nickel, N H ^a   Genzel, Ch ^a   Fuhs, W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENT SUBSTRATES; FILM-SUBSTRATE INTERFACES; HEAVILY DOPED; PHONON PEAKS; RAMAN MEASUREMENTS; RAMAN SHIFT; THERMAL EXPANSION COEFFICIENTS; X RAY MEASUREMENTS;

QUARTZ; SILICON; SUBSTRATES;

INTERFACES (MATERIALS);

EID: 0036607987     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1476083     Document Type: Article

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