Interface formation between metals (Cu, Ti) and low dielectric constant organic polymer (FLARE™ 1.0)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 155-162

  Du, M ^a   Opila, R L ^a   Case, Carlye ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032351526     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580964     Document Type: Article

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