SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 675, Issue , 2001, Pages

Synthesis of ultrathin ta-C films by twist-filtered cathodic arc carbon plasmas

(2) Anders, André a Kulkarni, Ashok V a

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; COMPUTER SIMULATION; CORROSION; DEPOSITION; MAGNETIC STORAGE; MATERIALS TESTING; MONTE CARLO METHODS; PLASMAS; SYNTHESIS (CHEMICAL); ULTRATHIN FILMS;

BATTELLE CORROSION TESTS; FILTERED CATHODIC ARC SYSTEM; TWIST FILTER; TWIST FILTERED CATHODIC ARC CARBON PLASMAS; ULTRATHIN TETRAHEDRAL AMORPHOUS CARBON FILMS;

CARBON;

EID: 0035559739 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-675-w11.1.1 Document Type: Conference Paper

Times cited : (10)

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