Micro-nanomechanical and tribological characterization of ultrathin amorphous carbon coatings

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2328-2337

  Li, Xiaodong ^a   Bhushan, Bharat ^a  

^a Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; HARDNESS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; THICKNESS MEASUREMENT; TRIBOLOGY; WEAR RESISTANCE;

DIRECT ION BEAM DEPOSITION; FILTERED CATHODIC ARC DEPOSITION; SCRATCH RESISTANCE; ULTRATHIN AMORPHOUS CARBON COATINGS;

ULTRATHIN FILMS;

EID: 0032676355     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0309     Document Type: Article

References (15)

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